In an advanced micro-lithographic system, it is of critical importance that components are resiliently isolated from external vibrations. In this paper, a passive/active electromagnetic solution is discussed, where passive permanent magnets (PM) provide the gravity compensation and active electromagnets accurate positioning. Focus is on PM modelling, as an accurate model is inevitable to achieve the high accuracy required for such application. This paper describes a study on interaction force along three degrees of freedom (DoF), between permanent magnets (PMs) having an unaligned magnetization direction for use in a PM-based suspension application. Feasibility of finite element modeling (FEM) and analytical modelling for such structures is discussed, implemented and verified with experimental measurements.