Research Area: | TU/e | Year: | 2009 | ||
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Type of Publication: | Article | ||||
Authors: | Janssen, JLG; Paulides, JJH; Lomonova, EA | ||||
Journal: | Journal of System Design and Dynamics | Volume: | 3 | ||
Number: | 4 | Pages: | 671-680 | ||
BibTex: |
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Abstract: | The development of sophisticated advanced vibration isolation is important, since even the minutest vibrations have disastrous effects on the performance of static and moving parts in high-precision machines. This paper concerns with the isolation of these vibrations for a large static body in an advanced micro-lithographic system, where a passive/active electromagnetic solution is presented. In these configurations passive permanent magnets (PM) provide the gravity compensation and active electromagnets the accurate positioning. However, this paper only considers the applicability of a passive magnetic solution for this high force gravity compensation application, or, more specifically, the influence of various PM array topologies on the force density. Further, fast-solving analytical models will be presented and will consequently be used to illustrate the feasibility of using passive permanent magnets for gravity compensation in this demanding high precision industrial application. |
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