01 Nov, 2020

Magnetic suspension based on passive gravity compensation

Research Area: TU/e Year: 2008
Type of Publication: In Proceedings
Authors: Janssen, JLG; Paulides, JJH; Lomonova, EA
Book title: 4th IEEE Benelux Young Researchers Symposium in Electrical Power Engineering
Pages: 1-5
Address: Eindhoven, The Netherlands
Month: 7-8 February, 2008
The ever increasing quest for smaller details on computer chips requires evermore accurate lithographic machinery. This paper discusses part of the design of a permanent magnet based vibration isolation system to be used within such machinery, specifically, concerns with the influence of flux-focusing materials, used for structural support and magnetic shielding, on the magnetic modeling and the interaction force.


Dr. J.L.G. (Jeroen) Janssen MSc

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